AXCELIS TECHNOLOGIES INC
Close on Oct 19, 2026
- Market cap
- $3.46B
- P/E (TTM)
- 37.3
- Dividend yield
- –
About Axcelis Technologies
Special Industry Machinery, NEC, SIC 3559
Axcelis Technologies designs, manufactures, and services ion implantation equipment and other processing machinery utilized in semiconductor chip fabrication. Its primary product lines include high-energy, high-current, and medium-current ion implanters, featuring the Purion platform and Ovation batch systems, alongside specialized tools for power device applications. The company also provides aftermarket lifecycle solutions, including spare parts, equipment maintenance, upgrades, pre-owned machinery, and technical training. Axcelis supplies its equipment and services to semiconductor manufacturers worldwide, including integrated device manufacturers, pure-play foundries, and chip designers.
The company is headquartered in Beverly, Massachusetts, where it operates a manufacturing facility, an advanced technology center, and a logistics center. It also maintains an operations facility in South Korea. Axcelis conducts sales and marketing activities across the United States, Europe, and Asia, with employees and products located in 27 countries globally.
Summary of the business section of Axcelis Technologies's latest annual report, written by StockData.
Company profile
Company
- Legal name
- AXCELIS TECHNOLOGIES INC
- Founded
- 1978
- Headquarters
- Beverly, MA
- Address
- 108 Cherry Hill Drive 01915
- Phone
- (978) 787-4000
- Website
- axcelis.com
- Employees
- 1,465, Dec 31, 2025
- Industry
- Special Industry Machinery, NEC
- Incorporated in
- Delaware
- Fiscal year ends
- December 31
- Auditor
- Ernst & Young LLP, Boston, Massachusetts
Stock & identifiers
- Ticker
- ACLS
- Exchange
- Nasdaq
- IPO date
- Jul 11, 2000
- Shares outstanding
- 31M, Aug 3, 2026
- Public float
- $2.18B, Jun 30, 2025
- Filer category
- Large accelerated filer
- Stock splits
- 1-for-4 reverse, Aug 8, 2016; 1-for-4 reverse, Jul 1, 2016
- SEC CIK
- 1113232
- CUSIP
- 054540208
- ISIN
- US0545402085
- LEI
- 529900HF9B6NL1QG9F05
- EIN
- 34-1818596
Executives and directors
Officers and directors who filed ownership reports (Forms 3, 4, 5) in the last two years
| Name | Position | Shares owned |
|---|---|---|
| Russell Low | PRESIDENT AND CEO, Director | 154,900 |
| Greg Redinbo | EVP and Chief Strategy Officer | 34,816 |
| Christopher Tatnall | EVP Global Customer Operations | 27,491 |
| David Ryzhik | SVP Interim CFO | 9,790 |
| Gerald M. Blumenstock | EVP, Research, Dev. & Eng. | 19,987 |
| Robert John Mahoney | EVP Global Operations | 14,410 |
| Todd Sutton | VP Corporate Controller | 6,360 |
| Eileen Evans | EVP, General Counsel and Sec'y | 31,295 |
| James Gordon Coogan | EVP AND CFO | 37,144 |
| Lynnette C. Fallon | EXECUTIVE VP, HR/LEGAL | 27,323 |
| Necip Sayiner | Director | 7,112 |
| Dennis Thomas St | Director | 17,695 |
| Gregory B. Graves | Director | 5,473 |
| John T. Kurtzweil | Director | 32,990 |
| Jeanne Quirk | Director | 11,400 |
| Tzu Yin Chiu | Director | 11,843 |
| Jorge Titinger | Director | 5,917 |
CEO pay and shareholder return
Pay versus performance table from the proxy statement
| Fiscal year | CEO total pay | CEO pay actually paid | Other executives (avg) | Value of $100 invested | Peer group |
|---|---|---|---|---|---|
| FY2025 Dr.Low | $5.10M | $6.44M | $1.57M | $276 | $253 |
| FY2024 Dr.Low | $4.29M | $1.62M | $1.28M | $290 | $269 |
| FY2023 Dr.Low | $4.14M | $6.51M | $1.26M | $538 | $226 |
| FY2023 PEO1 | $2.96M | $9.86M | $1.26M | $538 | $226 |
| FY2023 PEO2 | $4.14M | $6.51M | $1.26M | $538 | $226 |
| FY2022 Dr.Low | $1.46M | $1.75M | $1.46M | $329 | $137 |
“Actually paid” adjusts reported pay for changes in the value of equity awards. Shareholder return assumes $100 invested at the start of the measurement period, as disclosed by the company.
Employees
Headcount reported in annual reports
“As of December 31, 2025, we had 1,465 employees and 50 agency temporary staff worldwide.”
Corporate history
Events identified from SEC filings
| Date | Event | Details |
|---|---|---|
| Dec 8, 2025 | Merger | Registration of securities for a merger or exchange offer (S-4) |
| Feb 5, 2015 | Acquisition / sale | Completion of acquisition or disposition of assets (8-K Item 2.01) |
| Nov 30, 2012 | Listing notice | Notice of delisting or failure to satisfy a listing rule (8-K Item 3.01) |
| Nov 8, 2011 | Deregistration | Termination of SEC registration (Form 15) |
| Sep 17, 2009 | Listing notice | Notice of delisting or failure to satisfy a listing rule (8-K Item 3.01) |
| Apr 3, 2009 | Acquisition / sale | Completion of acquisition or disposition of assets (8-K Item 2.01) |
| Mar 16, 2009 | Late filing | Notification of late filing |
| Jul 11, 2000 | IPO | Initial public offering priced (424B4 prospectus) |