ASML Holding NV (ASML) operating KPIs
ASMLNasdaqSpecial Industry Machinery, NECFiscal year ends December 31Also trades as ASMLF
$1565.90−109.80 (-6.55%)
Close on Oct 30, 2026Market cap $603.53BP/E 56.6Yield –
ASML sales of Lithography Systems (Total Units)
Quarterly figures from ASML's filings and investor materials
Latest, Q3 2026
121.00
Period ended Sep 30, 2026
Change on a year earlier
+68.1%
72.00 in Q3 2025
History
43 quarters
Since Q1 2016
Sources
39
Documents cited below
Quarterly history
Hover a value to see the sentence it was read from; calculated values show their formula
Breakdown
What makes up sales of lithography systems (total units)
- New Lithography Systems Sold113.00 · Q3 2026
- Used / Refurbished Lithography Systems Sold8.00 · Q3 2026
- EUV Lithography Systems Sold (Total Units)17.00 · Q3 2026
- ArFi (Immersion DUV) Systems Sold40.00 · Q3 2026
- ArF Dry DUV Systems Sold10.00 · Q3 2026
- KrF DUV Systems Sold35.00 · Q3 2026
- I-Line DUV Systems Sold19.00 · Q3 2026
Cite this data
StockData. (2026). ASML Sales of Lithography Systems (Total Units), quarterly Q1 2016–Q3 2026 [Data set]. Compiled from ASML SEC filings and investor materials. https://stockdatahq.com/stocks/asml/kpis/litho_units_total
See every metric in the ASML KPI table. Data updated Oct 25, 2026.